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![PDF] MASK COST OF OWNERSHIP OF EXTREME ULTRAVIOLET LITHOGRAPHY VERSUS 193nm DOUBLE PATTERNING | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/c608833d9dce468ac97cef87ad5641a3e61fb054/43-Table4-1.png "PDF] MASK COST OF OWNERSHIP OF EXTREME ULTRAVIOLET LITHOGRAPHY VERSUS 193nm DOUBLE PATTERNING | Semantic Scholar")
PDF] MASK COST OF OWNERSHIP OF EXTREME ULTRAVIOLET LITHOGRAPHY VERSUS 193nm DOUBLE PATTERNING | Semantic Scholar
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